MKS Instruments 51A11TCA2BA001 technical specifications.
| Operating Pressure Range | 0psi to 0.2psi |
| Device Pressure Type | Absolute |
| Accuracy | ±0.5% |
| Min Operating Temperature | 0°C |
| Max Operating Temperature | 50°C |
| Max Operating Supply Voltage | 30V |
| Min Operating Supply Voltage | 20V |
| Port Type | Male |
| Response Time | 20ms |
| Typical Operating Supply Voltage | 24V |
| RoHS Version | 2002/95/EC |
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