| Type | Manufacturer |
|---|---|
| Website | https://www.kinetics.net/process-tools/mega-kinetics-fluid-systems/ |
| Phone number | +1 971-277-9000 |
| Address | 9398 SW Tualatin-Sherwood Rd. Tualatin, OR 97062 |
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Founded in 1990, Mega Fluid Systems has extensive experience offering world-class chemical and slurry delivery equipment to the global semiconductor, LED, pharmaceutical, specialty chemicals, and solar/PV industries. With a global installed base in Asia, Europe, and North America, our state-of-the-art systems continue to be chosen by leading customers worldwide to deliver the most difficult chemistries and sensitive slurries to their CMP tools and processes.
